Loading...

Particle Measuring Systems, Inc.

Boulder,  CO 
United States
http://www.pmeasuring.com
  • Booth: 235

Welcome to Semicon West 2023! Visit us at booth 235.

Overview

Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader in contamination monitoring, the inventor of laser particle counting, and now is the leading provider of solutions for monitoring and controlling many forms of contamination that impact companies that manufacture in ultra-clean environments.

Stop by Booth 235 to learn about cleanroom monitoring using our state of the art particle counters!


  Press Releases

  • The Ultra DI 20 Plus delivers all the industry-leading features of its predecessor, plus unrivaled particle matching, portability, and new applications. 

    July 5, 2022, Boulder, CO – The Ultra DI 20 Plus builds off the industry-leading sensitivity and reliability of the known and trusted Ultra DI line of instruments from Particle Measuring Systems (PMS). This newest model features unrivaled particle matching at concentrations less than 10 particles per ml and is optimized for increased confidence in reported data differences between particle counters – regardless of location. 

    Like its predecessor, the Ultra DI 20 Plus has an industry-leading sensitivity of 20 nm, and was built for low zero count and large sample volume while monitoring ultrapure liquids at a flow rate of 75 ml/min. With real-time particle measurement and benchmark detection, it enables an immediate response to detected contamination and quickly obtains meaningful statistical data for process management. Additionally, the new Ultra DI 20 Plus eliminates the need for a bulky environmental cabinet, and fast sample cleanup makes it quick and easy to transport between sample points for troubleshooting.  

    We are pleased to announce this addition to the Ultra DI family, it is the latest in a long line of high-quality liquid particle counters from Particle Measuring Systems.”, said Dwight Beal, Liquid Product Line Manager. He continued, “We spent many hours in the field studying best practices in process and contamination control and getting feedback from our customers so we can bring this cutting-edge instrument to market that offers truly advanced process control. We are enthusiastic about its particle count matching competency and the advanced capabilities the new Ultra DI 20 Plus will provide its users. 

    The Ultra DI 20 Plus is one of PMS “Industry Leading Sensitivity” products. This means there are no products on the market that are more sensitive than these and only PMS offers a line of products covering this many elements of production monitoring. PMS currently leads the market in monitoring performance, sensitivity, and reliability in Ultrapure Water, Chemical and Airborne Molecular Contamination Monitoring.  

  • The NanoAirTM 10 is a purpose-built 10 nm aerosol particle counter that enables the detection of yield impacting particles from within process tools, across critical cleanroom areas, and in pressurized high-purity gas.   

    November 15, 2022, Boulder, CO – The NanoAir 10 is a revolutionary new aerosol nanoparticle counter from Particle Measuring Systems (PMS) offering the sensitivity and accuracy of a Condensation Particle Counter (CPC) with the ease of use and functionality of a traditional cleanroom particle counter. It is designed to monitor ultra-clean environments and provides 10 nm detection sensitivity with a sample flow rate of 2.8 L/min.  

    The new NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative working fluid handling system design is robust and efficient, enabling 24/7, 365 days of continuous operation without the need for user intervention of any kind, between the annual working fluid refill and calibration. Additionally, the NanoAir 10 is high-pressure gas compatible when used with the PMS HPDIII - High Pressure DiffuserData can be viewed, analyzed, and reported using PMS facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs using MODBUS or 4-20mA output. 

    Used in conjunction with the NanoAir 10, the companion, ParticleSeeker™, 10-port smart manifold enables applications where multiple sample locations are required. The ParticleSeeker allows the NanoAir 10 to monitor up to 10 sample points using fully programmable sequences.  

    “Only Particle Measuring Systems brings you a 10 nm purpose-built aerosol particle counter designed specifically for use in the most critical fab spaces, and for applications that now include monitoring inside process tool minienvironments.”, said Isidro Sanchez, Electronics Global Product Line Manager at Particle Measuring Systems. He continued, “The remarkably compact form factor of the NanoAir 10, and companion ParticleSeeker smart manifold, now provide Electronics Manufacturers and Gas Suppliers the ability to monitor aerosol particles down to 10 nm in areas that were previously very difficult to reach. The NanoAir literally extends the reach of our reliable and innovative aerosol product line to improve both yield and output for our customers.” 

     

    About Particle Measuring Systems  

    Particle Measuring Systems, Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader and expert in contamination monitoring, the inventor of laser particle counting, and now is the leading provider of solutions for monitoring and controlling many forms of contamination that impact companies that manufacture in ultra-clean environments.  For more information visit pmeasuring.com. 


  Products

  • 20 nm Liquid Particle Counter: Ultra DI® 20 Plus
    Sensitivity range: 20 - 100 nm The Ultra DI 20 Plus liquid particle counter from Particle Measuring Systems (PMS) provides groundbreaking capabilities for monitoring of the most demanding ultrapure water systems. ...

  • Counting and sizing contaminants as small as 20 nm in combination with real-time statistical analysis enables efficient characterization of filtration systems and optimum process control.  The thermal stabilization which is designed into the UDI 20 Plus eliminates measurement uncertainty based on changing environmental conditions and provides best in class matching between multiple instruments. This allows users to easily move the unit between different locations, while maintaining consistent data and even compare results across sites globally.
  • NanoAir™ 10 Aerosol Particle Counter
    Sensitivity: 10 nm, Flowrate: 2.8 LPM (0.1 CFM) Purpose-built nanoparticle counter designed specifically for use in the most critical fab spaces....

  • The NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7, 365 days continuous operation without the need for maintenance or user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.

    A 10-port manifold companion product (ParticleSeeker™) supports applications that require multiple sample locations to be monitored in sequential or programmed sequences.

    Additionally, the NanoAir is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed, and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.

  • Syringe Liquid Particle Sampler: SLS-20
    For batch sampling applications using Chem 20 and Chem 20-HI particle counters ...

  • The SLS-20 Syringe Liquid Particle Sampler enables Particle Measuring Systems’ Chem 20TM or Chem 20-HI particle counters to operate in batch sampling applications. It is ideal for precise, small-volume sampling.

    The system consists of an SLS-20 for either corrosive or non-corrosive liquids, all connections necessary to interface with a compatible Chem 20 or Chem 20-HI particle counter and optional software.


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".